Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1976-06-14
1977-01-25
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156659, 252 793, H01L 750
Patent
active
040049574
ABSTRACT:
A solution comprising fluoroboric acid, nitric acid and ammonium fluoroborate is an isotropic etchant for monocrystalline and polycrystalline silicon which can be used to etch patterns which are delineated by etching masks formed of positive photoresists, thermally grown silicon oxide or deposited silox.
REFERENCES:
patent: 3106499 (1963-10-01), Kendall
patent: 3592773 (1971-07-01), Muller
patent: 3811974 (1974-05-01), Squillace et al.
Hamann H. Fredrick
Ochis Robert
Powell William A.
Rockwell International Corporation
Weber Jr. G. Donald
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