Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1982-12-17
1984-08-28
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
118728, 148175, 156611, 156612, 156613, 156345, 156646, 156662, 156DIG111, 427 87, 4272551, 427309, H01L 21306, H01L 736, B05D 512, C23C 1100
Patent
active
044682832
ABSTRACT:
A high velocity stream of gas comprising of either the carrier gas or one or more film forming or removing components is shot through a shooting means such as a nozzle or orifice in the form of a high speed stream of gas in a chemical vapor deposition growth chamber or within an attachment receiving reaction gases from such a chamber. This gas or mixture of gases entrains all of the adjacent gases within the vicinity of the shooting nozzle or orifice and is subsequently swept through a diffusion tube. The diffusion tube compresses and exhausts the gas mixture at a pressure sufficient to drive the combined gas mixture through a heat exchanger and finally back into the growth chamber. The gases within the growth chamber are provided for entrainment downstream to a heated base or substrate which is being coated with a thin film or epitaxial layer of film forming components contained in a carrier gas. The entrained temperature adjusted gas mixture together with the high velocity gas mixture is reintroduced upstream of the same heated base or substrates in the growth chamber.
REFERENCES:
patent: 3522118 (1970-07-01), Taylor et al.
patent: 3721583 (1973-03-01), Blakeslee
patent: 3916034 (1975-10-01), Tsuchimoto
patent: 4095004 (1978-06-01), Fraas et al.
patent: 4401507 (1983-08-01), Engle
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