Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1989-09-26
1990-11-13
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156639, 156656, 1566591, 156665, 156666, 156902, 156662, 156345, B44C 122, C23F 100, C03C 1500, H01L 21306
Patent
active
049699733
ABSTRACT:
In the etching by means of an etching solution of an electrically conductive layer applied to a substrate the time profile or variation of the diffusion current flowing between the layer to be etched away and the etching solution is measured. The substrate is removed from the etching solution as soon as the diffusion current passes through a steep drop for the second time and assumes a constant value.
REFERENCES:
patent: 4462856 (1984-07-01), Abe et al.
patent: 4662975 (1987-05-01), Dufresne et al.
Endl Helmut
Rinck Helmut
Hiller William E.
Merrett N. Rhys
Powell William A.
Sharp Melvin
Texas Instruments Deutschland GmbH
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