Method for epitaxial deposition

Details Method for epitaxial deposition Method for epitaxial deposition

1992-07-20

1994-01-18

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437105, 427585, 118725, 156613, H01L 2120

Patent

active

052799867

ABSTRACT:
The cooling air flow path extends from a blower through a tapered input duct to a large plenum chamber which coaxially surrounds and extends over the top of the deposition apparatus. From this plenum chamber cooling air flows coaxially downward over the surface of the quartz bell jar which forms the reaction chamber, and radially inward through the banks of radiant heater lamps coaxially surrounding the bell jar. Each bank of heater lamps is readily removed for servicing by being rotated into an open position about a pivot axis extending along one verical edge. From the open position, the bank can be slid sideways in slots in the supports and removed from the apparatus.

REFERENCES:
patent: 3862397 (1975-01-01), Anderson et al.
patent: 4728389 (1988-03-01), Logar
patent: 4772356 (1988-09-01), Schumaker et al.
patent: 4848372 (1989-07-01), Ohmuna et al.
patent: 4858557 (1989-08-01), Pozzetti et al.
patent: 5037674 (1991-08-01), Kojima et al.
patent: 5053247 (1991-10-01), Moore

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