Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1973-05-02
1978-05-16
Pitlick, Harris A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
118 495, 118 72, 148174, 148175, 156613, 156614, 156662, 427 86, H01L 21205, H01L 21306
Patent
active
040897354
ABSTRACT:
Described is a method of epitactic precipitation of crystalline material from the gaseous phase, upon substrate bodies. The carrier of the substrate bodies is moved in the reaction vessel during the precipitation process. At least one transport member, which carries the substrate bodies to be coated, is passed through locks into the reaction chamber, which is provided with the required reaction conditions and following precipitation, during which the reaction conditions are being maintained, is passed through locks out of the reaction chamber.
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Lerner Herbert L.
Pitlick Harris A.
Siemens Aktiengesellschaft
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