Method for electronically imaging the potential distribution in

Details Method for electronically imaging the potential distribution in Method for electronically imaging the potential distribution in

1979-03-21

1980-09-16

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

324158D, G01N 2300

Patent

active

042232201

ABSTRACT:
A method for electronically imaging the potential distribution in an electronic component such as an integrated circuit in which the phase of the pulses of the primary electron beam is shifted by a time delay with respect to the potential distribution in the component with a multiple of the frequency of the line deflection of the primary electron beam on the component and a frequency synchronous therewith chosen as the frequency of the time delay.

REFERENCES:
patent: 3531716 (1970-09-01), Tarui et al.
patent: 3549999 (1970-12-01), Norton
patent: 3764898 (1973-10-01), Bohlen et al.
patent: 3956698 (1976-05-01), Malmberg et al.
"Voltage Coding: Temporal vs. Spatial Frequencies," Lukianoff et al., Scanning Elec. Micro, 1975, pp. 465-471.
"Stroboscopic Scanning Electron Microscope," Plows et al., J. of Sci. Ins., 1968, series 2, vol. 1, pp. 595-600.

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