Metal fusion bonding – Process – Plural joints
Patent
1995-12-01
1997-04-08
Heinrich, Samuel M.
Metal fusion bonding
Process
Plural joints
228193, 228208, 438683, H01L 2150
Patent
active
056179910
ABSTRACT:
Disclosed herein is a method for electrically conductive metal-to-metal bonding. The method for bonding flat metal surfaces comprises the steps of depositing a thin layer of titanium on a first surface of a first metal surface, placing the first surface of the first metal surface in contact with a first surface of a second metal surface in an inert ambiance, heating the inert ambiance to a temperature substantially below the melting point of the metal surfaces, and forming a titanium metal bond between the first metal surface and the second metal surface to provide a low resistive path between the first metal surface and the second metal surface.
REFERENCES:
patent: 4244002 (1981-01-01), Sato et al.
patent: 5134460 (1992-07-01), Brady et al.
Nayak Deepak
Pramanick Shekhar
Advanced Micro Devices , Inc.
Chaikin, Esq. Douglas A.
Heinrich Samuel M.
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