Method for directing plasma flow to coat internal passageways

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma

Reexamination Certificate

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Details

C427S457000, C427S230000, C427S237000, C427S238000, C118S7230AN, C118S7230ER, C118S7230ER, C204S192100

Reexamination Certificate

active

07838085

ABSTRACT:
An apparatus for coating surfaces of a workpiece configured to establish a pressure gradient within internal passageways through the workpiece, so that the coating within the internal passageways exhibits intended characteristics, such as those relating to smoothness or hardness. The coating apparatus may include any or all of a number of cooperative systems, including a plasma generation system, a manipulable workpiece support system, an ionization excitation system configured to increase ionization within or around the workpiece, a biasing system for applying a selected voltage pattern to the workpiece, and a two-chamber system that enables the plasma generation to take place at a first selected pressure and the deposition to occur at a second selected pressure.

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