Method for diamond coating by microwave plasma

Details Method for diamond coating by microwave plasma Method for diamond coating by microwave plasma

1994-05-31

1996-01-09

King, Roy V.

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

427575, 427249, 427122, 4272555, 423446, 118728, 118729, H05H 146

Patent

active

054827485

ABSTRACT:
A method for coating components such as cutting tools with diamond using a microwave plasma excited gas mixture in a reactor equipped with a bowl-shaped substrate table having a concave inner surface for supporting the components to be coated. The plasma forms a plasma ball during the coating operation and the geometrical shape, configuration and position of the table is adapted to stabilize the plasma and control the shape and position of the plasma in such a way that the outer surface of the plasma conforms substantially to the surfaces of the components to be coated.

REFERENCES:
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patent: 4943345 (1990-07-01), Asmussen et al.
patent: 5023065 (1991-06-01), Jones
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patent: 5169676 (1992-12-01), Moran et al.
patent: 5175019 (1992-12-01), Purdes et al.
patent: 5271971 (1993-12-01), Herb et al.
Bunshah, R. F. Deposition Technologies for Films and Coatings Noyes Publications 1982 p. 20.

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