Method for determining the depth of a buried structure

Details Method for determining the depth of a buried structure Method for determining the depth of a buried structure

2007-12-11

2007-12-11

Lyons, Michael A. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

10835259

ABSTRACT:
The present invention relates to a method for determining the depth of a buried structure in a semiconductor wafer. According to the invention, the layer behavior of the semiconductor wafer which is brought about by the buried structure when the semiconductor wafer is irradiated with electromagnetic radiation in the infrared range and arises as a result of the significantly longer wavelengths of the radiation used in comparison with the lateral dimensions of the buried structure is utilized to determine the depth of the buried structure by spectrometric and/or ellipsometric methods.

REFERENCES:
patent: 5034617 (1991-07-01), Isobe
patent: 5227861 (1993-07-01), Nishizawa et al.
patent: 5371596 (1994-12-01), Hattori et al.
patent: 5384639 (1995-01-01), Wickramasinghe
patent: 5392118 (1995-02-01), Wickramasinghe
patent: 5494697 (1996-02-01), Blayo et al.
patent: 5595916 (1997-01-01), Fujimura et al.
patent: 5604581 (1997-02-01), Liu et al.
patent: 5900633 (1999-05-01), Solomon et al.
patent: 6137575 (2000-10-01), Sugiyama et al.
patent: 6392756 (2002-05-01), Li et al.
patent: 6950186 (2005-09-01), Kikuchi
patent: 690 33111 (1990-09-01), None
patent: 0 650030 (1990-09-01), None
patent: 2003-243467 (2003-08-01), None
patent: 2003243467 (2003-08-01), None

Affiliated with

Also associated with

Rating

Method for determining the depth of a buried structure does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for determining the depth of a buried structure, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for determining the depth of a buried structure will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3894607