Data processing: generic control systems or specific application – Specific application – apparatus or process – Robot control
Reexamination Certificate
2006-05-02
2006-05-02
Black, Thomas G. (Department: 3661)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Robot control
C700S218000, C700S229000, C700S245000, C700S253000, C700S262000, C700S258000, C318S640000, C318S568160, C414S806000, C414S217000, C414S936000, C414S937000, C414S393000, C204S192120, C204S298350, C204S298150, C204S298250, C204S298260
Reexamination Certificate
active
07039501
ABSTRACT:
Generally, a method of determining a position of a robot is provided. In one embodiment, a method of determining a position of a robot comprises acquiring a first set of positional metrics, acquiring a second set of positional metrics and resolving the position of the robot due to thermal expansion using the first set and the second set of positional metrics. Acquiring the first and second set of positional metrics may occur at the same location within a processing system, or may occur at different locations. For example, in another embodiment, the method may comprise acquiring a first set of positional metrics at a first location proximate a processing chamber and acquiring a second set of positional metrics in another location. In another embodiment, substrate center information is corrected using the determined position of the robot.
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Cox Damon Keith
Freeman Marvin L.
Hudgens Jeffrey C.
Pencis Chris Holt
Rice Michael
Black Thomas G.
Marc McDieunel
Moser Patterson & Sheridan
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