Optics: measuring and testing – With plural diverse test or art
Patent
1995-08-03
1996-10-29
Gonzalez, Frank
Optics: measuring and testing
With plural diverse test or art
356316, 324 731, 324 92, 324 96, G01N 2100, G01J 330, G01R 2722
Patent
active
055701752
ABSTRACT:
A new method is described that allows determination of the degree of molecular dissociation based on continuous, radio frequency (rf) and microwave driven discharges based on electrostatic probe and emission spectroscopy measurements only. Using this method costly laser-induced fluorescence spectroscopy (LIF) can be avoided. The method described is particularly applicable to hydrogen plasmas characterized by non-thermal electron energy distribution functions which are of great practical importance. A compact combined fiber optic/electrostatic probe facilitating the required measurements is described.
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Dobele Frieder
Dowling Denis P.
Graham William G.
Kornas Volkhard
Morrow Thomas
Ceram Optec Industries Inc.
Eisenberg Jason D.
Gonzalez Frank
Skutnik Bolesh J.
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