Image analysis – Applications – Manufacturing or product inspection
Patent
1995-02-28
2000-06-13
Bost, Dwayne
Image analysis
Applications
Manufacturing or product inspection
382144, 382147, G06K 900
Patent
active
060758805
ABSTRACT:
The object of a method for detecting defects in the inspection of structured surfaces is to ensure a detection of defects which is not dependent on the number of structuring planes and includes structure features in real-time operation for separating defects from good structures. From image point classification in which zones of a recorded image which have similar image point features are assembled, a gray-value intermediate image containing edge structures and corner structures is generated from the image and the behavior of the image point features of every image point in the intermediate image is analyzed with respect to its neighboring image points. The method is used predominantly in statistical process control in the production process of masks, LCD's, printed circuit boards and semiconductor wafers.
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Franke Karl-Heinz
Graef Michael
Kempe Heiko
Kollhof Dietmar
Wienecke Joachim
Bost Dwayne
Jenoptik Technologie GmbH
Johnson Brian L
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