Method for detecting defects

Details Method for detecting defects Method for detecting defects

2008-05-27

2008-05-27

Carter, Aaron W (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C438S014000, C356S237100, C348S060000, C348S125000

Reexamination Certificate

active

10916591

ABSTRACT:
A method for inspecting a substrate for defects, including: (a) obtaining an inspected pixel and a reference pixel; (b) calculating an inspected value and a reference value, the inspected value representative of the inspected pixel and the reference value representative of the reference pixel; (c) selecting a threshold in response to a selected value out of the inspected value and the reference value; and (d) determining a relationship between the selected threshold, the reference value and the inspected value to indicate a presence of a defect.

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International Search Report dated Jul. 2, 2003.

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