Method for describing, evaluating and improving optical...

Optics: measuring and testing – By polarized light examination

Reexamination Certificate

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C356S071000, C356S124000

Reexamination Certificate

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07728975

ABSTRACT:
In a method for describing, evaluating and improving optical polarization properties of a projection objective of a microlithographic projection exposure apparatus, the Jones or Stokes vectors are firstly determined at one or more points in the exit pupil of the projection objective. These are then described at least approximately as a linear superposition of predetermined vector modes with scalar superposition coefficients. The optical polarization properties can subsequently be evaluated on the basis of the superposition coefficients.

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patent: 103 28 938 (2005-01-01), None
Russell A. Chipman, Polarization Analysis of Optical Systems, Optical Engineering, Feb. 1989, pp. 090-099, vol. 28, No. 2.
James P. McGuire, Jr.et al., Polarization Aberrations, 1. Rotationally Symmetric Optical Systems, Applied Optics, Aug. 1, 1994, pp. 5080-5100, vol. 33, No. 22.
E. Hecht, “Optics,” second edition (1987), pp. 321-323.

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