Optics: measuring and testing – By polarized light examination
Reexamination Certificate
2006-02-22
2010-06-01
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By polarized light examination
C356S071000, C356S124000
Reexamination Certificate
active
07728975
ABSTRACT:
In a method for describing, evaluating and improving optical polarization properties of a projection objective of a microlithographic projection exposure apparatus, the Jones or Stokes vectors are firstly determined at one or more points in the exit pupil of the projection objective. These are then described at least approximately as a linear superposition of predetermined vector modes with scalar superposition coefficients. The optical polarization properties can subsequently be evaluated on the basis of the superposition coefficients.
REFERENCES:
patent: 5910940 (1999-06-01), Guerra
patent: 6252712 (2001-06-01), Fürter et al.
patent: 6285443 (2001-09-01), Wangler et al.
patent: 7286245 (2007-10-01), Wegmann et al.
patent: 7304736 (2007-12-01), Westbrook
patent: 2003/0206289 (2003-11-01), Matsuyama
patent: 2005/0136340 (2005-06-01), Baselmans et al.
patent: 103 28 938 (2005-01-01), None
Russell A. Chipman, Polarization Analysis of Optical Systems, Optical Engineering, Feb. 1989, pp. 090-099, vol. 28, No. 2.
James P. McGuire, Jr.et al., Polarization Aberrations, 1. Rotationally Symmetric Optical Systems, Applied Optics, Aug. 1, 1994, pp. 5080-5100, vol. 33, No. 22.
E. Hecht, “Optics,” second edition (1987), pp. 321-323.
Dittmann Olaf
Feldmann Heiko
Kraehmer Daniel
Totzeck Michael
Alli Iyabo S
Carl Zeiss SMT AG
Sughrue & Mion, PLLC
Toatley , Jr. Gregory J.
LandOfFree
Method for describing, evaluating and improving optical... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for describing, evaluating and improving optical..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for describing, evaluating and improving optical... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4196133