Method for deposition of titanium oxide by a plasma source

Details Method for deposition of titanium oxide by a plasma source Method for deposition of titanium oxide by a plasma source

2011-07-12

2011-07-12

Meeks, Timothy H (Department: 1715)

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

C427S569000, C427S248100

Reexamination Certificate

active

07976909

ABSTRACT:
Process for depositing, on a substrate, a coating based on titanium oxide, which is characterized in that the coating with photocatalytic properties is deposited by chemical vapor deposition, especially from a gas mixture comprising at least one organometallic precursor and/or a metal halide of said metal oxide, the deposition being enhanced by a plasma source.

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