Coating processes – Coating by vapor – gas – or smoke – Metal coating
Reexamination Certificate
2005-06-07
2005-06-07
La Villa, Michael (Department: 1775)
Coating processes
Coating by vapor, gas, or smoke
Metal coating
C427S252000, C427S255150, C427S255230, C427S255260, C427S255280, C427S255390, C427S255700
Reexamination Certificate
active
06902763
ABSTRACT:
The present method provides tools for growing conformal metal nitride, metal carbide and metal thin films, and nanolaminate structures incorporating these films, from aggressive chemicals. The amount of corrosive chemical compounds, such as hydrogen halides, is reduced during the deposition of transition metal, transition metal carbide and transition metal nitride thin films on various surfaces, such as metals and oxides. Getter compounds protect surface sensitive to hydrogen halides and ammonium halides, such as aluminum, copper, silicon oxide and the layers being deposited, against corrosion. Nanolaminate structures (20) incorporating metal nitrides, such as titanium nitride (30) and tungsten nitride (40), and metal carbides, and methods for forming the same, are also disclosed.
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Elers Kai-Erik
Haukka Suvi P.
Kaipio Sari Johanna
Saanila Ville Antero
Soininen Pekka Juha
ASM International N.V.
Knobbe Martens Olson & Bear LLP
La Villa Michael
LandOfFree
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