Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1988-05-25
1989-06-06
Powell, William A.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427 541, 437234, D05D 306
Patent
active
048371130
ABSTRACT:
A II-VI compound, such as zinc sulfide, is deposited from a gaseous mixture in a reactor which is compatible with a vacuum processing system which includes vacuum wafer transport. Two manifolds are used, each connected to a supply of one or more reagent gases, to improve uniformity.
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Davis Cecil J.
Luttmer Joseph D.
Smith Patricia B.
York Rudy L.
Comfort James T.
Powell William A.
Rogers Joseph E.
Sharp Melvin
Texas Instruments Incorporated
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