Method for depositing compound from group II-VI

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board

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427 541, 437234, D05D 306

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048371130

ABSTRACT:
A II-VI compound, such as zinc sulfide, is deposited from a gaseous mixture in a reactor which is compatible with a vacuum processing system which includes vacuum wafer transport. Two manifolds are used, each connected to a supply of one or more reagent gases, to improve uniformity.

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