Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Patent
1991-09-30
1992-12-29
Pianalto, Bernard
Coating processes
Direct application of electrical, magnetic, wave, or...
Plasma
427249, 4272551, 427314, 4273722, B05D 306
Patent
active
051750198
ABSTRACT:
A microwave plasma rector is disclosed comprising a vacuum chamber, a microwave generator for generating a microwave standing wave therein, inlet and outlet ports, a susceptor within the chamber, at least one dielectric plate and a heater for heating the susceptor. The dielectric plate alters the shape of the produced plasma from a sphere to a short bulging cylinder. The modified plasma ball results in increased thickness uniformity of the deposited material.
Celli Francis G.
Purdes Andrew J.
Cantor Jay
Donaldson Richard L.
Pianalto Bernard
Stoltz Richard A.
Texas Instruments Incorporated
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