Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Patent
1996-07-01
1997-11-04
King, Roy V.
Coating processes
Direct application of electrical, magnetic, wave, or...
Plasma
427577, 4272555, B05D 306, C23C 1600
Patent
active
056837593
ABSTRACT:
A method for depositing a substance, such as diamond, by plasma deposition on a substrate mounted over a madrel cooled by a heat exchange, comprising the steps of: determining the heat flux at the deposition surface of the substrate; providing, between said mandrel and said substrate, a spacer having a thermal conductance in its thickness direction that varies in accordance with said determined heat flux; and depositing said substance on said substrate by said plasma deposition.
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Bak-Boychuk Gregory
Heuser Michael S.
Quirk William A.
Raney Daniel V.
Shepard, Jr. Cecil B.
Celestech Inc.
King Roy V.
Novack Martin M.
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