Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1997-11-05
1999-02-09
Baxter, Janet
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
430311, 430935, 427 58, 438909, G03C 1492, B05D 512
Patent
active
058692193
ABSTRACT:
The present invention discloses a method for coating a polyimide precursor on an electronic structure incorporating the use of a silicon coupling agent without any bubble defect in the film deposited. The method can be carried out by flowing at least one inert gas through a deposition chamber and thereby keeping the relative humidity in the chamber at below 25% to carry away the formation of any water molecules and water vapor to prevent the formation of bubbles in the film deposited.
REFERENCES:
patent: 5180691 (1993-01-01), Adachi et al.
patent: 5270079 (1993-12-01), Bok
Chen Hung-Chih
Chen Shih-Shiung
Kuo Chen-Cheng
Lan Ho-Ku
Ashton Rosemary
Baxter Janet
Taiwan Semiconductor Manufacturing Co. Ltd.
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