Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2011-02-15
2011-02-15
Masinick, Michael D (Department: 2128)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S113000, C700S121000, C438S005000, C438S007000, C438S800000, C414S222020
Reexamination Certificate
active
07890202
ABSTRACT:
A method of batching substrates in an automated processing tool, the automated process tool and a system for batching substrates in the automated process tool. The method includes selecting a first container containing a first group of substrates; simultaneously transferring each substrate of the first group of substrates into a batching station of the automated processing tool; selecting a second container containing a second group of substrates; selecting less than all substrates of the second group of substrates; and transferring each substrate of the less than all substrates of the second group of substrates to the batching station to form a third group of substrates.
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Arndt Russell Herbert
Biagetti Michael Robert
MacHugh Robert J.
Taft Charles Jesse
International Business Machines - Corporation
Masinick Michael D
Petrokaitis Joseph
Schmeiser Olsen & Watts
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