Method for controlling the oxygen level of silicon rods pulled a

Details Method for controlling the oxygen level of silicon rods pulled a Method for controlling the oxygen level of silicon rods pulled a

1981-05-22

1983-11-29

Bernstein, Hiram H.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156617SP, C30B 1522

Patent

active

044179430

ABSTRACT:
A method for controlling the oxygen concentration profile of a rod of crystalline material such as silicon being pulled from a melt in a crucible includes varying the crucible rotation speed during the pulling process. In a preferred embodiment, the average oxygen concentration profile of a rod pulled at a constant crucible rotation speed is measured and then this information is used in growing another rod by controlling the crucible rotation speed during the pulling process so that its slope is opposite to the slope of the measured average oxygen concentration profile.

REFERENCES:
patent: 3621213 (1971-11-01), Jen et al.
patent: 3669757 (1972-06-01), Kaufmann et al.
patent: 4239585 (1980-12-01), Kohl
patent: 4344815 (1982-08-01), Cazarra et al.

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