Method for controlling specific resistance of single crystal and

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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156605, 156606, 1566171, 1566181, 1566204, 422249, C30B 1520

Patent

active

051299860

ABSTRACT:
A method for controlling a specific resistance of a single crystal in a Czochralski-method type single crystal pulling apparatus having a hermetical chamber in which the single crystal is pulled up from a polycrystal melt and an inert gas supply and exhaust system by means of which an inert gas is supplied to the hermetical chamber and exhausted therefrom; the method being characterized in that the pneumatic pressure in the hermetical chamber and the supply rate of the inert gas are controlled in accordance with a prepared control pattern with respect to the passage of pulling time.

REFERENCES:
patent: 3342560 (1967-09-01), Eckardt et al.
patent: 3556732 (1971-01-01), Chang et al.
patent: 4400232 (1983-08-01), Ownby et al.
patent: 4956153 (1990-09-01), Yamagishi et al.

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