Method for controlling specific resistance of single crystal and

Details Method for controlling specific resistance of single crystal and Method for controlling specific resistance of single crystal and

1990-11-16

1992-07-14

Kunemund, Robert

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156605, 156606, 1566171, 1566181, 1566204, 422249, C30B 1520

Patent

active

051299860

ABSTRACT:
A method for controlling a specific resistance of a single crystal in a Czochralski-method type single crystal pulling apparatus having a hermetical chamber in which the single crystal is pulled up from a polycrystal melt and an inert gas supply and exhaust system by means of which an inert gas is supplied to the hermetical chamber and exhausted therefrom; the method being characterized in that the pneumatic pressure in the hermetical chamber and the supply rate of the inert gas are controlled in accordance with a prepared control pattern with respect to the passage of pulling time.

REFERENCES:
patent: 3342560 (1967-09-01), Eckardt et al.
patent: 3556732 (1971-01-01), Chang et al.
patent: 4400232 (1983-08-01), Ownby et al.
patent: 4956153 (1990-09-01), Yamagishi et al.

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