Method for controlling semiconductor processing equipment in rea

Details Method for controlling semiconductor processing equipment in rea Method for controlling semiconductor processing equipment in rea

1998-09-04

2000-07-18

Niebling, John F.

Semiconductor device manufacturing: process

With measuring or testing

324765, G01R 3126

Patent

active

060906324

ABSTRACT:
A method for controlling semiconductor processing equipment in real time, includes measuring a characteristic value of a product of a first process performed by a first piece of equipment. Then it is determined whether the characteristic value of the product is within a predetermined acceptable product range stored in a host computer. A second process is stopped from operating on the product when the product is not within the range. Otherwise, when the product is within range, the process is tested using a main test that includes computing a main statistic using the characteristic value of the product and determining whether the main statistic is within a predetermined control limit range. Then, if the main test is not passed, the process is interrupted, including stopping the first piece of equipment and postponing the second process from operating on the product.

REFERENCES:
patent: 5321354 (1994-06-01), Ooshima et al.
patent: 5910011 (1999-06-01), Cruse
patent: 5927512 (1999-07-01), Beffa
patent: 5940300 (1999-08-01), Ozaki

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