Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
1998-09-04
2001-04-10
Grant, William (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S111000
Reexamination Certificate
active
06216054
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a method for controlling equipment in a semiconductor manufacturing system, and more particularly, to a method for automatically controlling preventative maintenance (PM) cycles through a PM controlling module.
2. Description of the Related Art
Generally, the fabrication of semiconductor devices involves highly precise processes that require finely tuned precision equipment. Several pieces of precision equipment are typically employed in sequence and arranged on a semiconductor processing line. The operation of each piece of precision equipment on the line is closely monitored by operators to maintain and enhance the efficiency of the processing line.
As shown in
FIG. 1
, conventional fabrication equipment
3
are disposed on a conventional processing line. When a lot (not shown) of workpieces, such as wafers, are introduced into the equipment
3
, the equipment
3
performs a fabrication process on the lot. The equipment
3
is connected on-line to a host computer
1
through an equipment server
4
. An operator interface (O/I)
2
, for example an operator interface personal computer (O/I PC), is also connected on-line to the host computer
1
. Through the O/I
2
, an operator informs the host computer
1
that a process using the equipment
3
is about to commence. The operator inputs basic manufacture data, e.g., the identification number (ID) of the lot to be processed in the equipment
3
and the ID of the equipment
3
for performing the process with the lot, into the host computer
1
.
Then, based on the input basic manufacture data, the host computer
1
searches its data base for the process condition data to be applied to the process on the lot. The host computer
1
immediately downloads these process condition data, including preset process settings, to the equipment. Process settings may include, for example, a desired process time duration or a desired process temperature.
Thereafter, the operator checks the process condition data and inputs a process commencing command or a process terminating command. The lot is then automatically and rapidly routed into and out of the equipment
3
. In this manner, the process equipment
3
performs on the workpieces of each lot based on the process settings received.
While the processes are being performed, various operational parameters, e.g., the amount of time the equipment
3
has been operating and the number of the wafers that have been processed in the equipment
3
, are continuously monitored by the operator. In the event that certain operational parameters exceed predetermined levels that define periodic preventative maintenance cycles, the operator performs preventative maintenance on the equipment
3
to prevent, in advance, damage to the equipment.
However, such a conventional controlling system suffers from several problems. First, since detecting the preventative maintenance cycle event is determined by the subjective actions of an operator, the actual cycle may vary among operators, which results in lack of consistency in performing the preventative maintenance. Secondly, when an error occurs in detecting the preventative maintenance cycle event, the equipment may be damaged. Thirdly, in order to detect the preventative maintenance cycle event, the operator is required to be at the manufacturing line to continuously monitor the respective equipment at their own consoles, which results in reduced efficiency.
SUMMARY OF THE INVENTION
It is therefore an object of the present invention to protect processing line equipment from being damaged due to errors by the operators in detecting the preventative maintenance cycle events, by controlling the preventative maintenance cycles without any intervention by the operators.
It is another object of the present invention to reduce the time taken for the operators to monitor the equipment by automatically controlling the preventative maintenance cycle through a preventative maintenance (PM) controlling module.
To achieve the above objects and other objects and advantages of the invention, a method for controlling equipment in a semiconductor fabrication system includes automatically receiving, at a preventative maintenance module (PMM) in data communication with a host computer, operating parameter data from equipment in a semiconductor fabrication system. Specification data corresponding to the equipment are retrieved by the PMM from a preventative maintenance cycle data base. It is then determined at the PMM whether any of the operating parameter data exceeds the specification data. If any of the operating parameter data exceeds the specification data, a key value of a variable ID corresponding to the equipment is changed by the host computer. After changing the key value, an operating state of the equipment is modified, including inserting the variable ID into an equipment control message and downloading the equipment control message to the equipment.
Therefore, the present invention provides automatic control of the preventative maintenance cycles for the respective equipment.
REFERENCES:
patent: 4829445 (1989-05-01), Burney
patent: 5696689 (1997-12-01), Okumura
patent: 5751582 (1998-05-01), Saxena
patent: 5862054 (1999-01-01), Li
patent: 5923553 (1999-07-01), Yi
Choi Jai-seop
Jang Jae-man
Jung Jun
Grant William
Hartman Jr. Ronald D
Jones Volentine, LLC
Samsung Electronics Co,. Ltd.
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