Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1991-08-14
1993-01-12
Kunemund, Robert
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156601, 1566171, 1566191, 1566204, 156DIG80, 422249, C30B 1506
Patent
active
051787202
ABSTRACT:
A Czocharalski method for producing silicon rods wherein a single crystal silicon rod is pulled from a silicon melt contained in a coaxial crucible. In the method, the rod and crucible are rotated in opposite directions about their axes, the rotation rate of the rod being greater than the rotation rate of the crucible as the rod is grown. The rotation rate of the crucible is increased as the length of the rod increases. A magnetic field that is substantially rotationally symmetrical about the axis of the rod is imposed upon the silicon melt until a fraction of the silicon melt is solidified, the magnetic field having components which perpendicularly intersect the bottom and side walls of the crucible and a component which perpendicularly intersects the surface of the silicon melt. The average magnetic component which perpendicularly intersects the molten silicon surface is about zero, and the intensity of the magnetic field component which perpendicularly intersects the bottom and side walls of the crucible is decreased as the fraction of silicon melt solidified increases.
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Hirata et al., "Homogeneous Increase in Oxygen Concentration in Czochralski Silicon Crystals By a Cusp Magnetic Field", Journal of Crystal Growth, 98 (1989) pp. 777-781.
R. W. Series, "Effect of a Shaped Magnetic Field on Czochralski Silicon Growth", Journal of Crystal Growth 97 (1989) pp. 92-98.
Garrett Felisa
Kunemund Robert
MEMC Electronic Materials , Inc.
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