Method for controlling electrical conductivity

Details Method for controlling electrical conductivity Method for controlling electrical conductivity

2005-05-10

2005-05-10

Thompson, Craig A. (Department: 2813)

Semiconductor device manufacturing: process

Radiation or energy treatment modifying properties of...

C700S121000, C257S066000

Reexamination Certificate

active

06890870

ABSTRACT:
A method for controlling electrical conductivity to a work piece by irradiating pulse light from a light source onto the work piece, the method comprising a step of controlling the light irradiation index S of the pulse light in a 400≦S≦900 range, wherein light energy, pulse width and light irradiation index are represented by E J/cm2, τ sec, and S, and the S is defined as E/τ1/2.

REFERENCES:
patent: 4316074 (1982-02-01), Daly
patent: 4727044 (1988-02-01), Yamazaki
patent: 5399506 (1995-03-01), Tsukamoto
patent: 5808321 (1998-09-01), Mitanaga et al.
patent: 6066547 (2000-05-01), Maekawa
patent: 6165875 (2000-12-01), Fonash

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