Method for controlling charged particle beam, and charged...

Details Method for controlling charged particle beam, and charged... Method for controlling charged particle beam, and charged...

2006-12-26

2006-12-26

Berman, Jack (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S307000, C250S492100, C250S491100

Reexamination Certificate

active

07154090

ABSTRACT:
According to the invention, to achieve the above objective, there is provided a charged particle beam apparatus that creates a first image by irradiating a charged particle beam on a sample to scan a first pattern of the sample, controls on the basis of the first image the focus of the charged particle beam and the brightness and/or contrast of the image, and irradiates the charged particle beam to correctly scan a second pattern different from the first pattern by using the control conditions used to control the focus of the charged particle beam and the brightness and/or contrast of the image.

REFERENCES:
patent: 6147355 (2000-11-01), Ando et al.
patent: 6437330 (2002-08-01), Sugiyama
patent: 6838667 (2005-01-01), Tsuneta et al.
patent: 2003/0106999 (2003-06-01), Komuro et al.
patent: 2001-068048 (2001-03-01), None

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