Method for controlling apparatus for supplying steam for ashing

Details Method for controlling apparatus for supplying steam for ashing Method for controlling apparatus for supplying steam for ashing

1995-04-21

1998-11-03

Walberg, Teresa J.

Electric resistance heating devices

Heating devices

Vaporizer

118667, 392397, A61M 3306, F22B 2906, B05C 1100

Patent

active

058321772

ABSTRACT:
A method for controlling an apparatus for supplying steam to an ashing process. The apparatus includes a closed water-containing vessel formed from a material having good heat conductive characteristics for evaporating water to provide steam to a vacuum chamber housing an ongoing ashing process. In accordance with the procedure, steam evaporated in a closed steam supply tank is introduced into a vacuum chamber via a pressure reducing mass-flow controller. The temperature of the water in the supply tank, the temperature of the steam in the pipes leading from the supply tank to the mass-flow controller, the temperature of the steam in the pipes from the mass-flow controller to the vacuum chamber and the temperature of the steam in the mass-flow controller itself are all independently controlled such that the temperature in the water tank is equal to or less than the temperature in the pipes leading to and from the mass-flow controller and the temperature in the pipes is less than or equal to the temperature in the mass-flow controller.

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