Method for controlling a semiconductor processing apparatus

Details Method for controlling a semiconductor processing apparatus Method for controlling a semiconductor processing apparatus

2005-11-23

2009-02-24

Shechtman, Sean P (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S096000, C700S121000, C702S183000, C707S793000

Reexamination Certificate

active

07496422

ABSTRACT:
A method for controlling a batch-type semiconductor processing apparatus is provided. The method checks whether a recipe set based on basic process information is within a recipe group stored in the semiconductor processing apparatus. The method also checks whether the quantity of wafers read through lot mapping is correlated to the quantity of wafers indicated by the basic process information. During the semiconductor fabrication process, the method also checks whether a current recipe of the semiconductor processing apparatus is correlated to the set recipe.

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