Method for contact between two conductive or semi-conductive lay

Details Method for contact between two conductive or semi-conductive lay Method for contact between two conductive or semi-conductive lay

1988-06-29

1989-10-31

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156656, 156657, 1566591, 156662, 357 71, 437191, 437195, 437228, 437233, H01L 21306, B44C 122, C03C 1500, C23F 102

Patent

active

048774839

ABSTRACT:
A method of contact between two conductive or semiconductive layers deposited on a substrate is disclosed. The method comprises the following steps:

REFERENCES:
patent: 4397887 (1983-08-01), Aytac et al.
patent: 4423547 (1984-01-01), Farrar et al.
patent: 4518629 (1985-05-01), Jeuch
Self-Aligned Transistor with Sidewall Base Electrode, Kakamura et al., IEEE Transactions on Electron Devices, vol. ED-29, No. 4, Apr. 1982, pp. 596-600.

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