Method for coating the quartz burner of an HID lamp

Details Method for coating the quartz burner of an HID lamp Method for coating the quartz burner of an HID lamp

2007-12-11

2007-12-11

Fletcher, III, William Phillip (Department: 1762)

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

C313S113000, C313S114000, C313S635000

Reexamination Certificate

active

10502408

ABSTRACT:
In order to improve the energy balance of an HID lamp, the quartz burner, preferably the inside thereof, is coated with a UV reflecting layer system by alternatingly applying amorphous thin layers made at least of titanium oxide and silicon oxide having the respective general stoichiometry TiOyand SiOxby means of a plasma impulse chemical vapor deposition (PICVD) method at a high power density and increased substrate temperatures ranging from 100° to 400° C., using small growth rates ranging from 1 nm/sec to 100 nm/sec so as to form an interference layer system having a thickness of less than 1200 nm and a minimized UV-active defective spot rate ranging from 0.1 to 1 percent.

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