Cleaning and liquid contact with solids – Processes – Using solid work treating agents
Patent
1996-06-24
1998-12-15
El-Arini, Zeinab
Cleaning and liquid contact with solids
Processes
Using solid work treating agents
134 6, 134 21, 134 32, 134 33, 134 254, 15 3, 15 534, 15 802, 15 973, 15301, 15311, B08B 102, B08B 504, B60S 166, B60S 168
Patent
active
058490965
ABSTRACT:
A method for cleaning the wheels of a car used in a semiconductor manufacturing plant uses a pair of endless belts that carry a dust trapping material on their outer surfaces. The car is located with a wheel supported by two rollers that each carry one of the belts. One of the rollers is turned and as the wheel rides in a gap between the two belts it turns with the first belt and transfers a turning motion to the other belt. As the wheel turns with the belts, dust on the wheel is transferred to the belts.
REFERENCES:
patent: 3681805 (1972-08-01), Shelstad et al.
patent: 5261433 (1993-11-01), Smith
patent: 5264374 (1993-11-01), Watanabe et al.
patent: 5349714 (1994-09-01), Korbonski et al.
Chang Nick
Lee Chung-Yea
Ackerman Stephen B.
El-Arini Zeinab
Robertson William J.
Saile George O.
Taiwan Semiconductor Manufacturing Company , Ltd.
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