Method for cleaning the surface of a dielectric

Details Method for cleaning the surface of a dielectric Method for cleaning the surface of a dielectric

1996-12-06

2000-04-25

Chang, Joni

Semiconductor device manufacturing: process

Having magnetic or ferroelectric component

438240, H01L 2100

Patent

active

060543280

ABSTRACT:
This invention relates to a method for improving the chemical and electrical performance characteristics of a high dielectric constant material. The method comprises the steps of first obtaining a barium containing high dielectric constant material, the material having an upper surface and then modifying the surface chemistry of said upper surface by interacting said upper surface with a gas reactant in a closed environment. In a variant of the method, the gas reactant preferentially reacting with upper surface as compared to the bulk.

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