Method for cleaning substrate prior to tungsten deposition

Details Method for cleaning substrate prior to tungsten deposition Method for cleaning substrate prior to tungsten deposition

1995-11-15

1997-09-23

Powell, William

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

1566381, 134 3, 134 34, 437228ST, 437228T, 252 792, H01L 2100

Patent

active

056700164

ABSTRACT:
A method for cleaning a substrate prior to tungsten deposition is disclosed, said substrate having via holes and trenches lines thereon. The method includes steps of

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