Method for cleaning microwave applicator tube

Details Method for cleaning microwave applicator tube Method for cleaning microwave applicator tube

2006-05-31

2009-12-29

Carrillo, Sharidan (Department: 1792)

Cleaning and liquid contact with solids

Processes

Using sequentially applied treating agents

C134S001000, C134S001100, C134S001200, C134S001300, C134S002000, C134S003000, C134S027000, C134S028000, C134S029000, C134S030000, C134S034000, C134S035000, C134S036000, C134S040000

Reexamination Certificate

active

07638004

ABSTRACT:
A method of cleaning a microwave plasma applicator tube as described herein includes preparing a microwave plasma applicator for cleaning. A general cleaning of the plasma applicator tube is performed using an organic solvent wash and an ultrapure water wash. Selective cleanings of the tube are performed to remove selected contaminants. Such cleanings include a third wash with an alkaline cleaning solution, a fourth wash with an acidic cleaning solution and another wash using an ammonia and peroxide solution. The tube is rinsed using a sonicating wash performed in ultrapure water followed by drying. Also, the coil can be cleaned using acidic wash solution.

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