Method for cleaning a throttle valve

Details Method for cleaning a throttle valve Method for cleaning a throttle valve

Filed on

1994-02-03

Date issued

2000-04-11

Examiner

Vincent, Sean

Patent Class

Cleaning and liquid contact with solids

SubClass

Processes

SubSubClass

Including application of electrical radiant or wave energy...

Other Related Categories

134 1, 134 12, 134 13, 134 21, 156643, 438905, B08B 700, C23C 1640

Type

Patent

Status

active

Patent number

06047713&

Description

ABSTRACT:
An improved method of in-situ cleaning a throttle valve in a CVD device and exhaust flow control apparatus for facilitating such cleaning. The throttle valve is repositioned such that it is juxtaposed in close proximity to the exhaust gas port of the reaction chamber. A plasma is then ignited in a cleaning gas mixture of nitrogen trifluoride, hexafluoroethane and oxygen.

REFERENCES:
patent: 4960488 (1990-10-01), Law et al.
patent: 5158644 (1992-10-01), Cheung et al.
patent: 5260236 (1993-11-01), Petro et al.
patent: 5348774 (1994-09-01), Golecki et al.
"Throttle Valve for Vacuum System", May, 1968, IBM Technical Disclosure Bulletin, vol. 10, No. 12, 1988.

Affiliated with

Also associated with

Rating

Method for cleaning a throttle valve does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for cleaning a throttle valve, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for cleaning a throttle valve will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1169600