Method for cleaning a surface of a component of a...

Details Method for cleaning a surface of a component of a... Method for cleaning a surface of a component of a...

2006-10-03

2006-10-03

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000

Reexamination Certificate

active

07116394

ABSTRACT:
A cleaning system for removing contamination from at least a part of a surface of a component in a lithographic projection apparatus is disclosed. The cleaning system includes an electric field generator that generates an electric field to provide cleaning particles near the surface of the component.

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European Search Reported dated Nov. 25, 2003.
A copy of European Search Reported dated Mar. 12, 2004 for EP Application No. 03079145.3.

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