Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1978-03-06
1979-08-21
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156345, 156642, 204 38A, H01L 21312, C23F 102
Patent
active
041652525
ABSTRACT:
A method for chemically treating a single side of a workpiece, such as for etching or anodizing a semiconductor wafer, comprising, placing such a workpiece face down on a flat centrally apertured, relatively level table having a top or work surface of a size and shape commensurate with the dimensions of the workpiece and introducing the liquid for the chemical treatment between the top surface and side of the workpiece to be treated where the liquid passes over the entire surface to be treated and then returns to its source. The method also includes, for certain applications, a pre-processing of the workpiece by oxidizing the workpiece surface on the side of the workpiece opposite of the one to be treated to be treated to prevent creeping of the liquid around the edges thereof.
REFERENCES:
patent: 4021279 (1977-05-01), Hirs
IBM Technical Disclosure Bulletin, vol. 16, No. 5, Oct. 1973, Adjustable Fluid Profile Control for Etching by Hecker, p. 1625.
Chemical Engineers' Handbook, Third Edition, 1950 (copyright), p. 408 (Rotameters).
Burroughs Corporation
Dwyer Joseph R.
Peterson Kevin R.
Powell William A.
Young Mervyn L.
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