Method for characterizing vibrational performance of charged...

Details Method for characterizing vibrational performance of charged... Method for characterizing vibrational performance of charged...

2011-04-26

2011-04-26

Johnston, Phillip A (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S310000, C250S442110

Reexamination Certificate

active

07932494

ABSTRACT:
A method of characterizing the vibrational performance of a charged particle beam microscope system having at least one encoder is disclosed. The encoder is part of a control system for controlling the speed of a stage whereupon a sample is secured for imaging. A plurality of images each corresponding to a specific encoder working frequency are analyzed to generate imaged pattern vibration amplitude information over an imaging time period. The generated imaged pattern vibration amplitude information is then transformed to generate an imaged pattern vibration amplitude information over a range of encoder working frequencies. Information of system vibrational performance is then derived from the encoder working frequency-based vibration amplitude information. As a result, the vibrational performance of the system is characterized to describe the system vibrational behavior in terms of imaged pattern vibration amplitudes at varying working frequencies of the encoder.

REFERENCES:
patent: 6992290 (2006-01-01), Watanabe et al.
patent: 7271917 (2007-09-01), Van Donkelaar et al.
patent: 7352149 (2008-04-01), Butler et al.
patent: 2009/0182521 (2009-07-01), Sill et al.

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