Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation
Reexamination Certificate
2005-02-08
2005-02-08
Hoff, Marc S. (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system
Performance or efficiency evaluation
C700S108000
Reexamination Certificate
active
06853953
ABSTRACT:
A method for characterizing the performance of an electrostatic chuck prior to installing the chuck in the vacuum chamber of a semiconductor processing system in a production line. One or more characteristics of the electrostatic chuck are measured and compared with the known characteristics of a reference chuck. The comparison indicates the performance of the chuck and projects the performance of the chuck in an actual operating environment. The characteristics that are measured include the chuck impedance, the current-voltage characteristic of the chuck, the local plasma density proximate the support surface of the chuck, and the cooling or heating rate of the chuck.
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Brcka Jozef
Jones Bill
Leusink Gert
Long Jeffrey J.
Oliver Bill
Baran Mary Catherine
Hoff Marc S.
Tokyo Electron Limited
Wood Herron & Evans L.L.P.
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