Method for carrying object to be processed

Details Method for carrying object to be processed Method for carrying object to be processed

2008-05-13

2008-05-13

Lebentritt, Michael (Department: 2812)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C414S805000, C438S800000, C257SE21159

Reexamination Certificate

active

10529171

ABSTRACT:
A method for carrying an object to be processed used for a processing apparatus which comprises a plurality of process chambers including a specific process chamber for a process in which the object in process is easily contaminated and a carrying mechanism having two picks. The method includes a plurality of carrying steps wherein the object in process is sequentially carried from one chamber to another among the plurality of process chambers. One of the two picks is used in carrying steps up right before carrying the object into the specific process chamber, and the other pick is used in the step of carrying the object into the specific process chamber and the later carrying steps.

REFERENCES:
patent: 5932014 (1999-08-01), Hayashi et al.
patent: 6602793 (2003-08-01), Masterson
patent: 2002/0159864 (2002-10-01), Lowrance
patent: 1 152 456 (2001-11-01), None
patent: 05-021579 (1993-01-01), None
patent: 10-150090 (1998-06-01), None
patent: 11-026548 (1999-01-01), None

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