Method for calibrating rotating tools

Details Method for calibrating rotating tools Method for calibrating rotating tools

1998-07-24

2000-05-02

Raevis, Robert

Measuring and testing

Instrument proving or calibrating

Displacement, motion, distance, or position

H04N 718

Patent

active

060558423

ABSTRACT:
A method for monitoring the calibration of and calibrating rotating tools ich are liable to deviate, wherein at least one known deviation is recorded at a first predetermined rotational speed. The method can be used with annular saws that divide workpieces into semiconductor wafers.

REFERENCES:
patent: 3039235 (1962-06-01), Heinrich et al.
patent: 3175548 (1965-03-01), Weiss
patent: 3681978 (1972-08-01), Mathias et al.
patent: 4763533 (1988-08-01), Uitermarkt
patent: 4942611 (1990-07-01), Kunugi et al.
patent: 5642159 (1997-06-01), Oba
Derwent Abstract Corresponding to DE 34 42730, Aug. 1986.
Derwent Abstract Corresponding to DE 28 41 653, Sep. 1982.

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