Method for calibrating a radius test bench

Details Method for calibrating a radius test bench Method for calibrating a radius test bench

2006-12-26

2006-12-26

Lee, Andrew H. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S513000, C356S521000

Reexamination Certificate

active

07154612

ABSTRACT:
In a method for calibrating a radius test bench for measuring radii of optical elements, in particular of lenses and spherical mirrors, there are provided an illuminating system1that generates a spherical wave and a diffractive optical element3that retroreflects a spherical wave of a specific radius into itself. The diffractive optical element3is introduced into the radius test bench in at least two positions, a first position thereof being a cat's eye position1and another position being an autocollimation position, as a result of which it is possible to use the radius of curvature simulated by the diffractive optical element3to detect deviations of the radius test bench from this radius of curvature as errors of the radius test bench, and thus to take them into account in the measurements of optical elements to be tested.

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patent: 6940607 (2005-09-01), Freimann et al.
patent: 100 05 171 (2001-08-01), None
Selberg, Lars A.; “Radius Measurement by Interferometry,” Optical Engineering, vol. 31 (9), Sep., 1992, pp. 1961-1966.
An article entitled “Radius measurement by interferomety”(Author Lars A. Selberg, Zygo Corporation, Laurel Brook Road, Middlefield, Connecticut 06455), Optical Engineering, Dated Sep. 1992, vol. 31, No. 9.
An article entitled “Wiley Series in Pure and Applied Optics,” (copyright (c) 1992 by John Wiley & Sons, Inc.).

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