Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Reexamination Certificate
2009-04-21
2011-10-18
Barnes-Bullock, Crystal J (Department: 2122)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Article handling
C700S106000, C700S121000, C700S241000, C700S242000, C700S244000, C705S028000
Reexamination Certificate
active
08041451
ABSTRACT:
A method for providing bin-based control when manufacturing integrated circuit devices is disclosed. The method comprises performing a plurality of processes on a plurality of wafer lots; determining a required bin quantity, an actual bin quantity, and a projected bin quantity; comparing the determined required bin quantity with the determined actual bin quantity and determined projected bin quantity; and modifying at least one of the plurality of processes on the plurality of wafer lots if the determined actual bin quantity and determined projected bin quantity fail to satisfy the determined required bin quantity.
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Kuan Hsin
Mou Jong-I
Shih Chih-Sheng
Tsen Andy
Wang Jo Fei
Barnes-Bullock Crystal J
Haynes and Boone LLP
Taiwan Semiconductor Manufacturing Company , Ltd.
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