Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent
1992-01-15
1993-08-03
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Methods
250311, H01J 3726
Patent
active
052331920
ABSTRACT:
A method of autotuning an electron microscope by producing a series of images of the object to be examined, using a defined tilt of the electron beam in a different direction for each respective image. The images are thereby displaced relative to one another. Each image is then decomposed into a linear and a non-linear component thereof, and the linear image components are separated by Fourier filtering. The relative displacements of a number of the linear image components relative to each other are measured, and the measured displacement values are combined to derive autotuning parameters for the electron microscope.
REFERENCES:
patent: 3829691 (1974-08-01), Hufnagel
patent: 3971936 (1976-07-01), Hoppe
patent: 4514629 (1985-04-01), Smith et al.
patent: 4894540 (1990-01-01), Komatsu
patent: 4935625 (1990-06-01), Hasegawa et al.
patent: 5051585 (1991-09-01), Koshishiba et al.
patent: 5134288 (1992-07-01), Van Dijck
patent: 5144129 (1992-09-01), Kobayashi et al.
Ultramicroscopy, vol. 27, 1989, Amsterdam, pp. 251-273; A. J. Koster et al.
Proc. of the XIIth Int. Cong. for Electron Microscopy, 1990, San Francisco, pp. 26-27.
De Jong Alan F.
Van Dijck Dirk E. M.
Anderson Bruce C.
Eason Leroy
U.S. Philips Corporation
LandOfFree
Method for autotuning of an electron microscope, and an electron does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for autotuning of an electron microscope, and an electron, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for autotuning of an electron microscope, and an electron will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2272794