Method for automatic focusing an imaging optical system on...

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems

Reexamination Certificate

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Reexamination Certificate

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07041952

ABSTRACT:
A sample P is illuminated by a measurement light beam with an incidence angle differing from 0°; light reflected therefrom is detected; intensity values are recorded and evaluated; and the opening of a field stop is imaged onto a receiving surface, thereby generating an image. In such a method, a value of “light” or “dark” is allocated to each intensity value as a function of a brightness threshold; the smallest rectangle that encloses all “light” positions on the receiving surface is determined; the geometric center point of that rectangle is determined; the position of that point is compared with the position on the receiving surface that corresponds to the geometric center point of the image generated by the field stop in the focused state; and a change in the distance between the sample and the imaging optical system corresponding to the distance between the two points is effected.

REFERENCES:
patent: 4798948 (1989-01-01), Neumann et al.
patent: 5483079 (1996-01-01), Yonezawa
patent: 5604344 (1997-02-01), Finarov
patent: 5747813 (1998-05-01), Norton et al.

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