Method for automatic analysis of electron beam diffraction patte

Details Method for automatic analysis of electron beam diffraction patte Method for automatic analysis of electron beam diffraction patte

1984-02-29

1985-11-12

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250311, G01N 2300

Patent

active

045530300

ABSTRACT:
A video image of an electron diffraction pattern is digitized and captured as a two dimensional array of intensity values. From the array of intensity values, the frequency distribution of said intensity values is obtained. It is determined that the diffraction pattern is composed of only diffraction spots, only diffraction rings, or both diffraction spots and rings by analyzing said frequency distribution. The diffraction pattern is thus analyzed easily and automatically.

REFERENCES:
patent: 3790793 (1974-02-01), King
patent: 4376891 (1983-03-01), Rauscher et al.
patent: 4480188 (1984-10-01), de Azevedo

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