Method for applying coatings to objects by means of magnetic fie

Details Method for applying coatings to objects by means of magnetic fie Method for applying coatings to objects by means of magnetic fie

1988-08-01

1989-11-28

Weisstuch, Aaron

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20419216, 20419217, C23C 1434

Patent

active

048835749

ABSTRACT:
A method is described for applying coatings to objects by means of magnetic ield supported cathode sputtering in a vacuum, wherein, in order to achieve an improved coating rate, the total reactive gas quantity fed into a coating chamber is so measured that the reactive gas portion in the metal-reactive gas compound of the coating on the workpiece, is present in sub-stoichiometric relationship, and wherein the reactive gas flow in the chamber is conducted directly into the area of the workpieces to be coated, by-passing the sputtering cathode.

REFERENCES:
patent: 4384933 (1983-05-01), Takasaki
patent: 4428811 (1984-01-01), Sproul et al.
patent: 4702967 (1987-10-01), Black et al.
A. Mumtaz et al., J. Vac. Sci. Technol., vol. 20, pp. 345-348, (1982).
R. McMahon et al., J. Vac. Sci Technol, vol. 20, pp. 376-378, (1982).

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